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P447 - Beam shaping slits for hard X-ray synchrotron radiation at Beamline I14 at Diamond Light Source, Didcot, United Kingdom
P447 - Beam shaping slits for hard X-ray synchrotron radiation at Beamline I14 at Diamond Light Source, Didcot, United Kingdom

P447 – Beam Shaping Slits I14 DLS

Application

Beam shaping slits for hard X-ray synchrotron radiation

Year of delivery

2016

Installation site

Beamline I14 at Diamond Light Source, Didcot, United Kingdom

Design Features

  • Double slit mechanism – vertically and horizontally defining slits.

  • Motorized and encoded slits opening, symmetric opening, non-linear opening characteristics.

  • Tungsten slit blades.
  • Electrical isolation of all slit blades.
  • Isolated bias plate.
  • Adjustable support structure.

Performance Features

  • Precision and slit opening repeatability smaller than 100 nm.
  • Parallelism smaller than 1 µm over 10 mm edge length.
  • Straightness smaller than 0.3 µm over 10 mm edgle length.
  • Very small deviation (submicrometer) of the slit opening calibration curve from the theoretical non-linear slit opening function.

Outer Dimensions

P447 - Outer dimensions - Beam shaping slits for hard X-ray synchrotron radiation at Beamline I14 at Diamond Light Source, Didcot, United Kingdom

Technical specifications and performance values

General

Vacuum chamber

Chamber type

cylindrical, horizontal axis

Main flanges

DN160CF cluster flanges

Material

1.4301

Base pressure

10-10 mbar range

Horizontally defining slit (HDS)

Slit blades

Material

Tungsten

Straightness

< 0.25 µm over 10 mm (1σ)

Parallelism

-0.09 µm /mm
(15 µm slit opening)
-0.004 µm /mm
(95 µm slit opening)

Slit opening

Range

5 µm to 8.5 mm

Repeatability

± 0.04 µm
(up to 435 µm slit opening)

Resolution (design value)

0.006 µm /motor fine step
(1/16, recommended)
0.05 µm /encoder count

Vertically defining slit (VDS)

Slit blades

Material

Tungsten

Straightness

< 0.15 µm over 10 mm (1σ)

Parallelism

0.02 µm /mm
(15 µm slit opening)
-0.008 µm /mm
(95 µm slit opening)

Slit opening

Range

5 µm to 10 mm

Repeatability

± 0.038 µm
(up to 350 µm slit opening)

Resolution (design value)

0.006 µm /motor fine step
(1/16, recommended)
0.05 µm /encoder count

Performance Test Results

Slit width calibration (HDS)
P447 - Slit width calibration (HDS) - Beam shaping slits for hard X-ray synchrotron radiation at Beamline I14 at Diamond Light Source, Didcot, United Kingdom
Slit opening repeatability (HDS)
P447 - Slit opening repeatability (HDS) - Beam shaping slits for hard X-ray synchrotron radiation at Beamline I14 at Diamond Light Source, Didcot, United Kingdom
Slit blades parallelism (HDS)
P447 - Slit blades parallelism (HDS) - Beam shaping slits for hard X-ray synchrotron radiation at Beamline I14 at Diamond Light Source, Didcot, United Kingdom
Slit blades parallelism (HDS)
P447 - Slit blades parallelism (HDS) - Beam shaping slits for hard X-ray synchrotron radiation at Beamline I14 at Diamond Light Source, Didcot, United Kingdom
Slit width calibration (VDS)
P447 - Slit width calibration (VDS) - Beam shaping slits for hard X-ray synchrotron radiation at Beamline I14 at Diamond Light Source, Didcot, United Kingdom
Slit opening repeatability (VDS)
P447 - Slit opening repeatability (VDS) - Beam shaping slits for hard X-ray synchrotron radiation at Beamline I14 at Diamond Light Source, Didcot, United Kingdom
Slit blades parallelism (VDS)
P447 - Slit blades parallelism (VDS) - Beam shaping slits for hard X-ray synchrotron radiation at Beamline I14 at Diamond Light Source, Didcot, United Kingdom
Slit blades parallelism (VDS)
P447 - Slit blades parallelism (VDS) - Beam shaping slits for hard X-ray synchrotron radiation at Beamline I14 at Diamond Light Source, Didcot, United Kingdom
Residual gas analysis
P447 - Residual gas analysis - Beam shaping slits for hard X-ray synchrotron radiation at Beamline I14 at Diamond Light Source, Didcot, United Kingdom

Pictures