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P491 – Exit Slit Unit FURKA SwissFEL PSI
Application
Exit slit unit for soft X-ray radiation
Year of delivery
2021
Installation site
ATHOS beamline at Swiss FEL, Paul Scherrer Institut, Switzerland
Design Features
-
Vertically defining slit with motorized and encoded slit opening.
-
Symmetric slit opening, non-linear opening characteristics.
- Hardened stainless steel slit blades.
- Motorized and encoded manipulator (horizontal/vertical direction) with holder for scintillator screens.
- Adjustable support structure.
Performance Features
- Precision and slit opening repeatability smaller than 150 nm.
- Parallelism smaller than 0.5 µm over 10 mm edge length.
- Straightness smaller than 0.2 µm over 10 mm edge length.
- Very small deviation (submicrometer) of the slit opening calibration curve from the theoretical non-linear slit opening function.
Outer Dimensions
Technical specifications and performance values
General
Vacuum chamber
Chamber type
cylindrical, horizontal axis
Main flanges
DN160CF cluster flanges
Material
1.4301
Base pressure
10-10 mbar range
Vertically defining slit (VDS)
Slit blades
Material
hardened stainless steel
Straightness
< 0.70 µm over 38 mm (1σ)
Parallelism
0.04 µm /mm
(ca. 56 µm slit opening)
Slit opening
Range
3 µm to 9.2 mm
Repeatability
0.11 µm at 19 µm slit opening
0.05 µm at 45 µm slit opening
0.05 µm at 175 µm slit opening
Resolution (design value)
0.00156 µm /motor fine step
(1/64, recommended)
0.05 µm /encoder count
Manipulator for scintillator screens
Horizontal translation
Range
-11.80 mm to 11.84 mm
Resolution (design value)
0.23 µm /motor fine step
(1/64, recommended)
0.05 µm /encoder count
Resolution (measured value)
5 µm
Repeatability
0.70 µm (translation)
Vertical translation
Range
-50.35 mm 50 mm
Resolution (design value)
0.23 µm /motor fine step
(1/64, recommended)
0.05 µm /encoder count
Resolution (measured value)
5 µm
Repeatability
1.35 µm (translation)