P486 – Exit Slit Unit XAIRA ALBA CELLS
Application
Exit slit unit for soft X-ray radiation
Year of delivery
2021
Installation site
XAIRA beamline at ALBA of CELLS, Spain
Design Features
- Double slit mechanism – vertically and horizontally defining slits.
- Motorized and encoded slits opening, symmetric opening, non-linear opening characteristics.
- Motorized and encoded vertical translation of the vertically defining slit.
-
Tungsten slit blades.
-
Motorized and encoded slit unit horizonatal transversal translation.
- Adjustable support structure.
Performance Features
- Precision and slit opening repeatability smaller than 150 nm.
- Parallelism smaller than 2 µm over 10 mm edge length.
- Straightness smaller than 2 µm over 10 mm edge length.
- Small deviation of the slit opening calibration curve from the theoretical non-linear slit opening function.
Outer Dimensions
Technical specifications and performance values
General
Vacuum chamber
Chamber type
cylindrical, horizontal axis
Main flanges
DN160CF cluster flanges
Material
1.4301
Horizontal transversal translation
Range
-9.54 mm to 8.12 mm
Repeatability
0.40 µm
Hysteresis
4 µm
Linearity
1.90 µm
Parasitic roll
11.60 µrad
Resolution (design value)
0.003 µm /motor fine step
(1/64, recommended)
0.05 µm /encoder count
Resolution (measured value)
0.10 µm
Vertically defining slit (VDS)
Slit blades
Material
Tungsten
Straightness
< 1 µm over 10 mm (1σ)
Parallelism
-0.02 µm /mm at 27 µm slit opening
0.02 µm /mm at 60 µm slit opening
-0.06 µm /mm at 110 µm slit opening
Slit opening
Range
3 µm to 4 mm
Repeatability
0.05 µm at 27 µm slit opening
0.09 µm at 60 µm slit opening
0.07 µm at 110 µm slit opening
Slit center stability (> 1h)
0.026 µm
Resolution (design value)
0.00156 µm /motor fine step
(1/64, recommended)
0.05 µm /encoder count
Resolution (measured value)
0.50 µm
Slit vertical translation
Range
-2.34 µm to 2.31 mm
Repeatability
0.20 µm from 2 mm to -0.15 mm
0.06 µm from 2 mm to -0.10 mm
0.08 µm from 2 mm to 0 mm
0.15 µm fom 2 mm to 0.10 mm
Hysteresis
2 µm
Linearity
0.22 µm
Resolution (design value)
0.00156 µm /motor fine step
(1/64, recommended)
0.05 µm /encoder count
Resolution (measured value)
0.50 µm
Horizontally defining slit (HDS)
Slit blades
Material
Tungsten
Straightness
< 2 µm over 10 mm (1σ)
Parallelism
-0.01 µm /mm at 23 µm slit opening
-0.16 µm /mm at 50 µm slit opening
-0.04 µm /mm at 100 µm slit opening
Slit opening
Range
2.90 µm to 5 mm
Repeatability
0.10 µm at 24 µm slit opening
0.07 µm at 58 µm slit opening
0.05 µm at 105 µm slit opening
Slit center stability (2h)
0.038 µm
Resolution (design value)
0.00156 µm /motor fine step
(1/64, recommended)
0.05 µm /encoder count
Resolution (measured value)
0.50 µm
Performance Test Results
Slit unit translation linearity
Slit unit translation hysteresis
Slit unit translation repeatability
Parasitic roll after slit unit translation
Slit unit translation positioning resolution
Slit unit translation positioning resolution
Slit width calibration (VDS)
Slit opening repeatability (VDS)
Slit opening positioning resolution (VDS)
Slit center stability (VDS)
Slit blades parallelism (VDS)
Slit blades parallelism (VDS)
Slit blades parallelism (VDS)
Slit translation linearity (VDS)
Slit translation hysteresis (VDS)
Slit translation repeatability (VDS)
Slit translation positioning resolution (VDS)
Slit width calibration (HDS)
Slit opening repeatability (HDS)
Slit opening positioning resolution (HDS)
Slit center stability (HDS)
Slit blades parallelism (HDS)
Slit blades parallelism (HDS)
Slit blades parallelism (HDS)
Residual gas analysis
